Determination of Metallic Impurities in a Silicon Wafer by Local Etching and Electrothermal Atomic Absorption Spectrometry
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چکیده
منابع مشابه
Determination of metallic impurities in a silicon wafer by local etching and electrothermal atomic absorption spectrometry.
An etching technique for the determination of the metallic impurities distribution in silicon wafers has been developed. An area of 10 mmphi and 10 microm depth was etched by 100 microL of an etching solution with a HF and HNO3 mixture. The acid matrix was evaporated on the wafer surface by IR lamp illumination and vacuum exhaust. Metallic impurities remaining on the wafer surface were redissol...
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A determinação de Al, Cd, Co, Cr, Cu, Mg, Mn e Pb em nanotubos de carbono (CNTs) foi realizada por espectrometria de absorção atômica com atomização eletrotérmica e amostragem direta de sólidos (DSS-ET AAS, corretor de fundo com fonte de deutério). Foram avaliados os parâmetros de aquecimento, uso de Pd como modificador químico, possibilidade de calibração com soluções aquosas e massa máxima de...
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A method is described for direct electrothermal atomic absorption spectrometric (ETAAS) determination of cadmium in untreated samples of wine. Pyrolytic graphite tubes and graphite tubes with standard L'vov pyrolytic platforms were tested as atomizers. The detection limit achieved was 0.08 microg L(-1) Cd in wine. The relative standard deviation for the concentration range from 0.2 to 10 microg...
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Several elements (V, Mo, Fe, Mn, Cd, Zn) as metallic impurities in pure uranium compounds were quantitatively determined by atomic absorption spectrometry. The effects of uranium and that of other factors on the absorption intensity of each element were studied. The analyzed samples were dissolved in 6 M nitric acid, and uranium was selectively extracted with tributylphosphate. The aqueous solu...
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We describe an ultrasensitive and reliable method for determining vanadium in human serum by electrothermal atomic absorption spectrometry. After lyophilization, the serum is digested in acid at high pressure, and the digests are evaporated to a small volume. Vanadium in the digests is complexed with cupferron, extracted, and dried. The residue is redissolved in formic acid, where it is 15-fold...
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ژورنال
عنوان ژورنال: Analytical Sciences
سال: 2003
ISSN: 0910-6340,1348-2246
DOI: 10.2116/analsci.19.1051